Single Frequency Interferometer Systems

Single-frequency laser interferometers (SF-LI) are used for precise linear distance (displacement) measurement in machine tools and other equipment that use linear stages. They are generally more precise than physical scales based on rulings or screw pitch.

SF-LI use a frequency stabilized HeNe laser source emitting a single linearly-polarized beam. The beam is split into two beams, "measurement" and "reference". The measurement beam is reflected from a "retro-reflector" mounted on the moving mechanical system. The returned beam is mixed with the reference beam in a beam-combiner so that "quadrature" signals are recovered. This allows both direction and distance information to be recovered.

System Components Required (click for information)

• Single-frequency laser (one per system)
• Interferometer Module (with receivers) (one per axis)
• Retro-reflector (one per axis)
• Axis measurement board (one per axis)
• Dual-axis splitter (for dual axis operation)
• PC Controller

Specifications

• Laser Power: 1 mW, Class IIA, single frequency (633 nm)
• Resolution: 0.075 µm (lambda/4)
• Axis Board Range: 10 meters
• Tracking Speed : 3 m/sec (max)

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